F06600 - SEMI F66 - Specification for Port Marking and Symbol of Stainless Steel Vessels for Liquid Chemicals Revision:SEMI F66-1101 - Inactive SEMI E28-92 (Reapproved 0710)

SEMI E28-92 (Reapproved 0710)

Defining the terminology and the geometric properties of these edges will assist both the producers and users of substrates and processing/inspection equipment

SEMI F20-0706 (technical revision)

dry PV Si wafers supported by a mechanism that move the test specimen through the measurement equipment

F06600 - SEMI F66 - Specification for Port Marking and Symbol of Stainless Steel Vessels for Liquid Chemicals Revision:SEMI F66-1101 - Inactive SEMI E28-92 (Reapproved 0710)This specification was technically approved by the Global Liquid Chemical Distribution Systems Committee and is the direct responsibility of the Japanese Liquid Chemical Distribution Systems Committee. Current edition approved by the Japanese Regional Standards Committee on August 3, 2001. Initially available at www. semi. org September 2001; to be published November 2001. NOTICE: This Standard or Safety Guideline has an Inactive Status because the