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The scope of this Document is all grades of tetraethylorthosilicate used in the semiconductor industry
This Document covers requirements for hexafluoroethane used in the semiconductor industry
SEMI MF1390-02 (first SEMI publication)
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G08800 - SEMI G88 - Specification for Tape Frame for 450 mm Wafer Revision:SEMI G88-0211 - Superseded The scope of this DocumentThe purpose of this Document is to standardize the specifications for 450 mm wafer tape frames used between the dicing process and the die bonding process, and also used for shipping and handling. This Standard is applicable to 450 mm wafer tape frames. This Standard documents the dimensions, characteristics, and measurement methods for 450 mm wafer tape frames. This Standard can be used as the specification sheet for tape frame upon purchasing.
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