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The specifications for single-substrate cassettes will be developed in other documents
Utilities and Materials Used by Semiconductor Manufacturing Equipment
SEMI MF391-0310E (editorial revision)
SEMI D6-1296 (technical revision)
E04600 - SEMI E46 - Test Method for the Determination of Organic Contamination from Minienvironments Using Ion Mobility Spectrometry (IMS) Revision:SEMI E46-0307 - Inactive The specifications for single-substrate cassettesNOTICE: This Standard or Safety Guideline has Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. 1 Purpose 1. 1 The purpose of this Test Method is to provide an analytical procedureion mobility spectrometry (IMS)for the determination of organic contamination from minienvironments which has the capability of testing their
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